Shahin Zangooie : rechercher sur Z-Library

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1

Scatterometry performance enhancement by holistic approach

Li, Jie, Zangooie, Shahin, Boinapally, Karthik, Zou, Xi, Hu, Jiangtao, Liu, Zhuan, Yedur, Sanjay, Wilkens, Peter, Ver, Avraham, Cohen, Robert, Khamsehpour, Babak, Schroder, Holger, Piggot, John

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2014

Langue:

english

Fichier:

PDF, 3.02 MB

english, 2014

2

Planar pore-filling — adsorption in porous silicon

Dr. Robert B. Bjorklund, Shahin Zangooie, Prof. Hans Arwin

Journal:

Advanced Materials

Année:

1997

Langue:

english

Fichier:

PDF, 243 KB

english, 1997

3

Optical and microstructural characterization of thin films of photochromic fulgides

Roger Jansson, Shahin Zangooie, Thomas Kugler, Hans Arwin

Journal:

Journal of Physics and Chemistry of Solids

Année:

2001

Langue:

english

Fichier:

PDF, 3.28 MB

english, 2001

4

Monitoring specific interaction of low molecular weight biomolecules on oxidized porous silicon using ellipsometry

Danny van Noort, Stefan Welin-Klintström, Hans Arwin, Shahin Zangooie, Ingemar Lundström, Carl-Fredrik Mandenius

Journal:

Biosensors and Bioelectronics

Année:

1998

Langue:

english

Fichier:

PDF, 670 KB

english, 1998

5

Infrared Ellipsometry Characterization of Porous Silicon Bragg Reflectors

Zangooie, Shahin, Schubert, Mathias, Trimble, Chris, Thompson, Daniel W., Woollam, John A.

Journal:

Année:

2001

Langue:

english

Fichier:

PDF, 295 KB

english, 2001

6

Color changes in thin porous silicon films caused by vapor exposure

Bjorklund, Robert B., Zangooie, Shahin, Arwin, Hans

Journal:

Applied Physics Letters

Année:

1996

Langue:

english

Fichier:

PDF, 295 KB

english, 1996

7

Adsorption of Surfactants in Porous Silicon Films

Bjorklund, Robert B., Zangooie, Shahin, Arwin, Hans

Journal:

Année:

1997

Langue:

english

Fichier:

PDF, 423 KB

english, 1997

8

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Scatterometry performance improvement by parameter and spectrum feed-forward

Cain, Jason P., Sanchez, Martha I., Li, Jie, Zangooie, Shahin, Boinapally, Karthik, Zou, Xi, Hu, Jiangtao, Liu, Zhuan, Yedur, Sanjay, Wilkens, Peter, Ver, Avraham, Cohen, Robert, Khamsepour, Babak

Année:

2014

Langue:

english

Fichier:

PDF, 564 KB

english, 2014

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Scatterometry as technology enabler for embedded SiGe process

Vaid, Alok, Allgair, John A., Raymond, Christopher J., Pal, Rohit, Sendelbach, Matthew, Zangooie, Shahin, Lensing, Kevin, Hartig, Carsten

Année:

2008

Langue:

english

Fichier:

PDF, 399 KB

english, 2008

10

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Assessing scatterometry for measuring advanced spacer structures with embedded SiGe

Sendelbach, Matthew, Allgair, John A., Raymond, Christopher J., Zangooie, Shahin, Vaid, Alok, Herrera, Pedro, Leng, Jingmin, Kim, InKyo

Année:

2008

Langue:

english

Fichier:

PDF, 396 KB

english, 2008

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Enhanced optical CD metrology by hybridization and azimuthal scatterometry

Cain, Jason P., Sanchez, Martha I., Zangooie, Shahin, Li, Jie, Boinapally, Karthik, Wilkens, Peter, Ver, Avraham, Khamsepour, Babak, Schroder, Holger, Piggot, John, Yedur, Sanjay, Liu, Zhuan, Hu, Jian

Année:

2014

Langue:

english

Fichier:

PDF, 600 KB

english, 2014

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Characterization of 32nm node BEOL grating structures using scatterometry

Zangooie, Shahin, Allgair, John A., Raymond, Christopher J., Sendelbach, Matthew, Angyal, Matthew, Archie, Charles, Vaid, Alok, Matthew, Itty, Herrera, Pedro

Année:

2008

Langue:

english

Fichier:

PDF, 416 KB

english, 2008

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Metrology, Inspection, and Process Control for Microlithography XXVII - Scatterometry accuracy improvement using 3D shapes

Zangooie, Shahin, Myneni, Satyanarayana, Wilkens, Peter, Keller, Nicholas J., Sarathy, Thankasala P., Tabet, Milad, Starikov, Alexander, Cain, Jason P.

Année:

2013

Langue:

english

Fichier:

PDF, 555 KB

english, 2013

14

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Characterization of capacitive 3D deep trench mask open structures using scatterometry

Zangooie, Shahin, Archie, Chas N., Herrera, Pedro, Mesfin, Abebe, Archie, Chas, Sendelbach, Matthew

Année:

2007

Langue:

english

Fichier:

PDF, 445 KB

english, 2007